ZENG, Q.; SUN, S. Recent Advances in Chemical Mechanical Polishing Technologies of Silicon Carbide. Fine Chemical Engineering, [S. l.], v. 4, n. 2, p. 271–287, 2023. DOI: 10.37256/fce.4220233264. Disponível em: https://ojs.wiserpub.com/index.php/FCE/article/view/3264. Acesso em: 3 jul. 2024.