Effect of CeO2/Ag2O on Etching Ratio and Crystallization Shrinkage of Photosensitive Glass-Ceramics

Abstract

Based on Li₂O-Al₂O₃-SiO₂ system, photosensitive glass-ceramics with different CeO₂/Ag₂O ratios were prepared using the melting method. To improve the yield of through-hole processing in photosensitive glass-ceramics and the service life of Micro Electro Mechanical systems (MEMS), the effect of CeO₂ content on the transmittance of various samples before and after UV exposure was examined. Additionally, the effect of CeO₂/Ag₂O ratio on the crystallization shrinkage and etching performance of photosensitive microcrystalline glass was studied both before and after heat treatment. The research results indicate that the optimal CeO₂/Ag₂O ratio in the photosensitive microcrystalline glass component is approximately 0.03%/0.12%, and the transmittance of the basic glass sample is about 50.8% (@ 310 nm, 1mm thickness). The crystallization shrinkage rates before and after glass exposure are 0.08% and 0.26%, respectively. The highest etching ratio is about 18:1.