Enhancing Electrical Properties and Seebeck Effects of WO3 Thin Films Using Spray Pyrolysis: Insights into the Conductivity and Carrier Type

Abstract

This study focuses on enhancing the electrical and thermoelectric properties of tungsten trioxide (WO₃) thin films using the spray pyrolysis technique. Three samples, namely A₁, A₂, and A₃, were prepared by depositing the films onto glass substrates at different deposition rates: R₁ = 1 mL/min, R₂ = 3 mL/min, and R₃ = 7 mL/min, respectively. Subsequently, the films underwent annealing at 500 °C for 2 hours in the air. A detailed investigation was conducted to analyze the structural, morphological, optical, and electrical properties of the WO₃ thin films. The Field Emission Scanning Electron Microscope (FE-SEM) images revealed the formation of circular strings with varying diameters for all layers. The diameter of each string decreased as the deposition rate increased. X-ray diffraction (XRD) structural analysis indicated that, before annealing, sample A₁ exhibited a polycrystalline nature with mixed tetragonal-hexagonal phases, while the other two samples were amorphous. After annealing, sample A₃ also became polycrystalline. Moreover, the UV-Vis spectra analysis demonstrated a monotonic decrease in the band gap of the layers with increasing spray rate, potentially attributed to the attenuation of the quantum confinement effect. The Seebeck effect was used to authenticate the n-type conductivity of the WO₃ layers, as the Seebeck effect and conductivity exhibited a direct connection. Furthermore, the current-voltage variation was found to align with the oxygen vacancies sites. Remarkably, the sample A₃ with the highest deposition rate exhibited the lowest resistivity.